SUBSTRATE-PROCESSING APPARATUS, SUBSTRATE-PROCESSING SYSTEM, AND SUBSTRATE TRANSFER METHOD

摘要

PURPOSE: To minimize damages to peripheral members even when a wafer carrier falls down during movement or lifting/lowering operations of the wafer carrier on a substrate-processing apparatus. CONSTITUTION: A substrate-processing apparatus for performing prescribed processing operation over a wafer transferred from a load port door includes a load port base 2a for mounting thereon a wafer carrier, accommodating a plurality of wafers in front of the load port door and a shielding plate provided, so as to surround the periphery of the load port base 2a.