发明名称 MAGNETISM DETECTING ELEMENT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To solve the problem that insulating property, resistance to developing solution, smoothness and heat dissipating property of an insulating barrier layer are not sufficient since alumina or the like is used for material of the insulating barrier layer in the conventional magnetism detecting element of a tunneling magnetoresistive effect type. SOLUTION: An insulating barrier layer 13 is formed by using insulating material whose composition formula is shown by Al-Si-O or Si-O-N. Consequently, insulating property, resistance to developing solution, smoothness and heat dissipating property of the insulating barrier layer 13 can be improved.
申请公布号 JP2002280635(A) 申请公布日期 2002.09.27
申请号 JP20010074128 申请日期 2001.03.15
申请人 ALPS ELECTRIC CO LTD 发明人 HAYAKAWA YASUO
分类号 G01R33/09;G11B5/31;G11B5/39;G11B5/40;H01F10/30;H01F10/32;H01L43/08;H01L43/12;(IPC1-7):H01L43/08 主分类号 G01R33/09
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