| 摘要 |
PROBLEM TO BE SOLVED: To provide a treatment apparatus in which the corrosion of a metal as a constituent member can be prevented effectively and by which a prescribed treatment can be executed stably without accompanying metal contamination. SOLUTION: The treatment apparatus is used to treat an object to be treated; at least a part of its constituent member is composed of aluminum or an aluminum alloy; at least the remaining part is composed of stainless steel or nickel; and so an insulation material is installed between the aluminum or the aluminum alloy, and the stainless steel or the nickel which are adjacent to each other. The treatment apparatus is provided with a treatment-gas inlet member which is installed at a treatment-chamber formation material composed of aluminum, used to partition a treatment chamber and which is composed of aluminum, in order to introduce treatment gas and a treatment-gas supply pipe, which connects the treatment-gas introduction member and a treatment-gas supply pipe and which is composed of stainless steel. The treatment-gas supply pipe is connected to the treatment-gas inlet member via the insulation material.
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