| 摘要 |
The present invention relates to a method and apparatus for properly and consistently spacing an electrode from a workpiece while electrochemically etching (ECM) grooves to a precise depth in a surface of the workpiece to form a fluid dynamic bearing. The electrode is especially designed for imparting a grooved pattern to a flat surface, the electrode comprising a surface carrying the pattern to be formed on the flat surface, and a central rod extending a short distance above the electrode surface. The central rod precisely sets the gap between the electrode and the flat surface. The electrode is adapted to be electrically connected to a power supply so that the electrode serves as the cathode, and the flat work piece serves as the anode in an ECM system.
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