| 摘要 |
PROBLEM TO BE SOLVED: To provide a turbo-molecular pump which will not cause an electric power source device to be large sized, even if the pump body becomes enlarge sized. SOLUTION: A rotor 17 of a turbo mechanism having an exhaust mechanism is rotationally driven by a DC brushless motor 12 to exhaust process gas from a suction port to an exhaust port side, and a heater 21 for pump temperature adjustment is provided on an optional part to prevent adhesion of a product from process gas components. Regenerated electric power, generated from the rotational energy of the inertia of the rotor 17 during deceleration of the rotor 17 of a turbo mechanism is consumed at the heater 21 for pump temperature adjustment.
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