| 摘要 |
PROBLEM TO BE SOLVED: To keep the temperature of the cooling part of a vacuum pump within a set range, to reduce consumption of cooling water, and to prevent excessive cooling of cooling water and cooling part, for preventing insufficient cooling. SOLUTION: Opening of a flow rate variable valve 22 is controlled, to continuously change cooling water flow, according to the temperature of cooling parts 25, 26 of the vacuum pump P for smoothly controlling the temperature of the cooling part of the vacuum pump.
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