PROCESSING SOLUTION REPLENISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To rationally constitute a processing solution replenishing device capable of rigidly and inexpensively managing a processing solution in a stock part by simple structure. SOLUTION: The device is provided with a stock tank ST filled with the processing solution supplied from a cartridge C, a replenishing system for replenishing the processing solution from the stock tank ST to a processing tank and a remaining amount sensor SE for detecting that the remaining amount of the processing solution is a set value or less. If the rise of a liquid surface can not be discriminated by the sensor SE in charging the processing solution from the cartridge C when the empty state of the processing solution is discriminated by the sensor SE, a charge disabled state is determined.