发明名称 |
Surface micromachined optical system with reinforced mirror microstructure |
摘要 |
Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.
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申请公布号 |
US2002154422(A1) |
申请公布日期 |
2002.10.24 |
申请号 |
US20010840698 |
申请日期 |
2001.04.23 |
申请人 |
SNIEGOWSKI JEFFRY J.;RODGERS M. STEVEN |
发明人 |
SNIEGOWSKI JEFFRY J.;RODGERS M. STEVEN |
分类号 |
B81B3/00;G02B26/08;(IPC1-7):G02B26/08 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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