| 摘要 |
PURPOSE: A composite MFC(Mass Flow Controller) is provided to accurately control mass flow of a gas by stably and constantly maintaining output pressure in accordance with variation of input pressure using a control valve. CONSTITUTION: The composite MFC comprises a supply pipe(104) for physically connecting between an inlet(102) and an outlet(116), a bypass pipe(106), a pressure filter(108), a control board(110), a deep switch(112), and a control valve(114). The pressure filter(108) is located at one side of the inlet(102) for controlling input pressure. The control board(110) detects a pressure of mass flow via the bypass pipe(106) and generates a control signal for controlling the deep switch(112). The control valve(114) is located at one side of the outlet(116) and controls stably and constantly output pressure of the outlet(116) according to the voltage value from the deep switch(112).
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