APPARATUS FOR FABRICATING SEMICONDUCTOR DEVICE

摘要

PURPOSE: An apparatus for fabricating a semiconductor device is provided to minimize an area of a chamber by reducing areas of components within the chamber. CONSTITUTION: A susceptor driving plate goes down and a susceptor(10) is moved to a home position. At this time, a lower portion of a lift pin(60) is contacted with a bottom face(A-A) of a chamber. A gate valve is opened and a wafer(50) is loaded on the lift pin(60) if the susceptor(10) is located at the home position and the lift pin goes up. The gate valve is closed and the wafer loading process is finished. The wafer(50) is loaded on the susceptor(10) if the susceptor(10) goes up to the first region and the lift pin(60) goes down. The susceptor(10) is moved to the first region. A desired process is performed if the susceptor(10) having the wafer(50) is moved to the first region. The susceptor(10) having the wafer(50) is moved to the home position if the desired process is finished. The lift pin(60) is contacted with the bottom face(A-A) of the chamber and the wafer(50) goes up. A slot valve of the chamber is opened and the process is finished.