| 摘要 |
PURPOSE: A semiconductor device having a cassette fixing part is provided to locate stably a cassette for transferring a plurality of wafers by using a fixing member. CONSTITUTION: A semiconductor device is formed with a wafer(10), a cassette(20), a processing device(30), and a fixing member(40). One lot is formed by 25 wafers(10). One lot of wafers(10) is loaded into the cassette(20). The cassette(20) has a plurality of slots in order to transfer 25 wafers(10), safely. The wafer(10) is located between the slots of the cassette(20). The cassette(20) includes a frame having the first support member(21) and the second support member(22). The first support member(21) and the second support member(22) have fins, respectively. The cassette(20) is loaded on the processing device(30). The fixing member(40) is installed on a surface of the processing device(30). The fixing member(40) is formed with the first member(41) and the second member(42).
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