| 摘要 |
A microactuator includes a wafer; a lower electrode formed on an upper surface of the wafer; a side electrode formed on the upper surface of the wafer in a perpendicular relation with the lower electrode; a pair of supporting posts protruding from the upper surface of the wafer, spaced from the lower electrode at a predetermined distance, respectively; a reflector spaced from the side electrode at a predetermined distance, and facing the lower electrode; and a pair of torsion springs disposed between the reflector and the supporting posts, and elastically supporting the reflector enabling pivoting movement of the reflector. By employing the side electrode, the microactuator can be driven with a low voltage. Also, since the side electrode serves as a stopper, the microactuator can pivot the reflector at an exact desired angle, without having to use a separate device.
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