发明名称 |
Device having a barrier layer located therein and a method of manufacture therefor |
摘要 |
A device for use in a micro-electro-mechanical system (MEMS) optical device. The device includes a substrate having opposing first and second sides and a diffusion barrier layer formed over at least the first side. The device further includes a light reflective optical layer formed over the diffusion barrier layer on the first side of the substrate. The second side may desirably have a stress balancing layer located thereover.
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申请公布号 |
US2002181110(A1) |
申请公布日期 |
2002.12.05 |
申请号 |
US20010874838 |
申请日期 |
2001.06.05 |
申请人 |
BOWER JOHN ERIC;GROSS MICHAL E.;JIN SUNGHO;MAVOORI HAREESH;RAMIREZ AINISSA |
发明人 |
BOWER JOHN ERIC;GROSS MICHAL E.;JIN SUNGHO;MAVOORI HAREESH;RAMIREZ AINISSA |
分类号 |
B81B3/00;B81C1/00;G02B6/34;G02B6/35;G02B26/08;(IPC1-7):G02F1/29;G02B5/02;G02B13/20;G02B5/08 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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