发明名称 Method for manufacturing a mosfet having deep SD regions and SD extension regions
摘要 A method for forming a MOSFET includes the step of forming deep SD regions and ordinary SD regions by ion-implantation using a gate structure having a gate electrode and associated side walls as a mask, removing the side walls from the gate electrode, forming SD extension regions and pocket regions by ion-implantation using the gate electrode as a mask, and forming other side walls on the gate electrode.
申请公布号 US2003011029(A1) 申请公布日期 2003.01.16
申请号 US20020191434 申请日期 2002.07.10
申请人 NEC CORPORATION 发明人 MATSUDA TOMOKO
分类号 H01L21/265;H01L21/336;H01L29/78;(IPC1-7):H01L29/76;H01L29/94;H01L31/062 主分类号 H01L21/265
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