发明名称 |
Method for crystallizing amorphous film and method for fabricating LCD by using the same |
摘要 |
A method for crystallizing an amorphous film for enhancing a crystallinity and minimizing an amount of remaining metal in a polycrystalline silicon thin film, and a method for fabricating a liquid crystal display device (LCD) by using the same. The method for crystallizing an amorphous film including forming an amorphous film on a substrate; forming a thin first metal layer; forming a second metal layer on the amorphous film at predetermined parts; and heat treating the amorphous film, for crystallizing the amorphous film.
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申请公布号 |
US2003013279(A1) |
申请公布日期 |
2003.01.16 |
申请号 |
US20020189510 |
申请日期 |
2002.07.08 |
申请人 |
JANG JIN;KIM KYUNG HO;KIM AH YOUNG |
发明人 |
JANG JIN;KIM KYUNG HO;KIM AH YOUNG |
分类号 |
G02F1/136;C30B1/02;H01L21/20;H01L21/336;H01L29/786;(IPC1-7):C30B1/00;H01L21/36 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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