发明名称 Method for crystallizing amorphous film and method for fabricating LCD by using the same
摘要 A method for crystallizing an amorphous film for enhancing a crystallinity and minimizing an amount of remaining metal in a polycrystalline silicon thin film, and a method for fabricating a liquid crystal display device (LCD) by using the same. The method for crystallizing an amorphous film including forming an amorphous film on a substrate; forming a thin first metal layer; forming a second metal layer on the amorphous film at predetermined parts; and heat treating the amorphous film, for crystallizing the amorphous film.
申请公布号 US2003013279(A1) 申请公布日期 2003.01.16
申请号 US20020189510 申请日期 2002.07.08
申请人 JANG JIN;KIM KYUNG HO;KIM AH YOUNG 发明人 JANG JIN;KIM KYUNG HO;KIM AH YOUNG
分类号 G02F1/136;C30B1/02;H01L21/20;H01L21/336;H01L29/786;(IPC1-7):C30B1/00;H01L21/36 主分类号 G02F1/136
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