发明名称 METHOD AND APPARATUS FOR SCHLIEREN ANALYSIS
摘要 PROBLEM TO BE SOLVED: To provide a method and apparatus for the objective schlieren analysis/measurement, due to a shadow method fitted, not only to an optical glass material but also to a crystalline material. SOLUTION: The method for the schlieren objective analysis/measurement includes a step (a) for irradiating a test sample with a light from a light source, a step (b) for forming the shadow image of the test sample on a projection screen, a step (c) for receiving the shadow image of the test sample projected on the projection screen by an electronic picture-receiving device, a step (d) for processing the shadow image received by the electronic picture-receiving device to measure the schlieren image contrast and a step (e) for comparing the image contrast of the schlieren measured, on the basis of the shadow image of the test sample with the image contrast of the schlieren of the shadow image of the schlieren pattern of a comparison sample for measuring the schlieren of the test sample.
申请公布号 JP2003021596(A) 申请公布日期 2003.01.24
申请号 JP20020108578 申请日期 2002.03.07
申请人 CARL ZEISS:FA;CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG 发明人 GERHARD MICHAEL;LENTES FRANK-THOMAS;KUSCH CHRISTIAN;SINGER WOLFGANG;MOERSEN EWALD
分类号 G01M11/00;G01N21/27;G01N21/45;G01N21/896;G01N21/958;G06T1/00;G06T7/00;(IPC1-7):G01N21/45 主分类号 G01M11/00
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