GAS INJECTION PLATE OF ASHING APPARATUS

摘要

PURPOSE: A gas injection plate of an ashing apparatus is provided to prevent a depositing phenomenon of components of a photoresist layer by forming a gas injection plate with quartz. CONSTITUTION: A gas injection plate(30) has a circular shape on a plane. A plurality of screw holes(33) are formed on a peripheral portion(31) of the gas injection plate(30). The screw holes(33) are used for combining the gas injection plate(30) with an ashing apparatus. A plurality of injection holes(37) are formed on a center portion(35) of the gas injection plate(30). The peripheral portion(31) of the gas injection plate(30) is thicker than the center portion(35) of the gas injection plate(30) since the peripheral portion(31) of the gas injection plate(30) has mechanical intensity. The gas injection plate(30) can be formed with quartz. The peripheral portion(31) of the gas injection plate(30) can be formed with aluminium or stainless steel.