| 摘要 |
PROBLEM TO BE SOLVED: To provide a lens-holding device, by which highly accurate optical performance is maintained over a long period of time by restraining stress applied to a lens member out of the stress excessively applied to a lens barrel and the stress caused between the lens barrel and a lens-holding member to a minimum, by using the lens-holding member to suppress the gravity deformation of the lens-holding member in the lens holding device, in which the lens member is held by the lens-holding member and the lens-holding member is held by the lens barrel, and to provide a projection exposure device incorporating the lens-holding device. SOLUTION: The lend-holding device is provided with the lens-holding member for holding the lens member and the lens barrel for holding the lens holding member. A space is formed between a lens-receiving part to hold the lens member and a lens barrel holding part held by the lens barrel in the lens-holding member, to suppress the gravity deformation of the lens member. Stresses, applied from the lens barrel in the direction of the lens member are relaxed by the space of the lens-holding member.
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