| 摘要 |
PROBLEM TO BE SOLVED: To increase an imaging speed by eliminating a dead time associated with computation for renewing, when suspending drawing and renewing the deflection region which can be followed. SOLUTION: Sample table coordinates, where the transfer of deflection amount which can be followed occurs, are predicted at all times during writing. Based on the estimated sample table coordinates, an amount of deflection of a main deflector at transfer is calculated in advance. Thereby, a downtime caused by the transfer of the amount of deflection which can be followed can be reduced, increasing the productivity of an electron beam lithographic apparatus.
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