| 摘要 |
PROBLEM TO BE SOLVED: To provide new moisture proof film, which prevents invasion of moisture and oxygen into an organic EL element. SOLUTION: In at least a part of an exposed surface of a thin film organic EL element, the moisture proof film, which consists of SiMx Oy (M is at least one kind of element chosen from the group which consists of C, N, and B, and it is 0.05<=x<=0.5, and is 1.5<=y<=1.95), is provided.
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