| 摘要 |
PROBLEM TO BE SOLVED: To precisely detect defects of various kinds of inspected specimens. SOLUTION: A film 16 of the inspected specimen is irradiated with a light beam 17 by a projector 10. The light beam transmitted through the film 16 is photoreceived by a photoreceiver 20. A slit plate 22 and a lens 23 with a mask are provided in front of the photoreceiver 20. They are positioned selectively in a photoreceiving window 20c of the photoreceiver 20 by a shift mechanism 25. A mask photoreceiving system by the lens 23 with the mask or a slit photoreceiving system by the slit plate 22 gets selectable thereby. Which photoreceiving system a corresponding form belongs to is determined by a from specifying part 40, based on a form signal, and the shift mechanism 25 is operated to be brought into the photoreceiving system. The optimum photoreceiving system is selected in response to the form of the inspected specimen to detect the defect precisely.
|
