发明名称 |
Heat treatment unit and heat treatment method |
摘要 |
A heat treatment unit comprises a heat plate made of aluminum nitride which is excellent in heat conductivity and strength inside thereof. The entire circumference of the heat plate is supported by a supporting member which is excellent in thermal insulation. The heat treatment unit is equipped with a nozzle for blowing dry air against the reverse side of the heat plate. When a temperature of the heat plate is lowered, the dry air is blown from the nozzle, thereby quickly lowering the temperature of the heat plate.
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申请公布号 |
US6534750(B1) |
申请公布日期 |
2003.03.18 |
申请号 |
US20000672878 |
申请日期 |
2000.09.29 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
TANOUE MITSUHIRO;ODA TETSUYA |
分类号 |
H01L21/027;H01L21/00;(IPC1-7):H05B3/68;C23C16/00 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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