| 摘要 |
PROBLEM TO BE SOLVED: To provide an evacuation device capable of realizing the low power consumption in an auxiliary pump, and efficiently saving the energy as a whole. SOLUTION: This evacuation device comprises a dry vacuum pump 20, a check valve 28 for releasing a discharge side of the dry vacuum pump 20 to the atmospheric air, and the auxiliary pump 30 mounted in parallel with the check valve 28 and evacuating the discharge side of the dry vacuum pump 20. A control device 33 is mounted for controlling an operating condition of the auxiliary pump 30 on the basis of the output of a pressure sensor 35 detecting the discharge-side pressure of the dry vacuum pump 20, so that a rotating speed of the auxiliary pump 30 is reduced or the operation of the auxiliary pump 30 is stopped when the discharge-side pressure of the dry vacuum pump 20 is less than a predetermined pressure, to reduce the power consumption in the auxiliary pump.
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