发明名称 Low thermal expansion ceramic and member for exposure system
摘要 A low-thermal-expansion, rigid and wear-resistant ceramic is provided. The low-thermal-expansion ceramic of the invention includes 60 vol % to 99.9 vol % of at least one selected from the group consisting of cordierite, spodumene and eucryptite and 0.1 vol % to 40 vol % of at least one selected from the group consisting of carbides, nitrides, borides and silicides of group 4a elements, group 5a elements and group 6a elements, and boron carbide. The ceramic has a porosity of 0.5 % or less and a thermal expansion coefficient, at 10° C. to 40° C., of 1.5x10-6/° C. or less.
申请公布号 US2003100434(A1) 申请公布日期 2003.05.29
申请号 US20020257027 申请日期 2002.10.08
申请人 YOSHITOMI YASUKI;ARAHORI TADAHISA 发明人 YOSHITOMI YASUKI;ARAHORI TADAHISA
分类号 C03C10/08;C03C10/12;C04B33/14;C04B35/18;C04B35/19;C04B35/195;C04B35/645;(IPC1-7):C03C10/08;C03C14/00;C04B35/52;C04B35/583;C04B35/584;C04B35/565;C04B35/58 主分类号 C03C10/08
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