| 摘要 |
PROBLEM TO BE SOLVED: To perform a highly accurate shape measurement while a contact-type probe is not tilted, even on a slope in a measuring apparatus by which the three-dimensional shape of a work is measured by scanning the shape by the contact-type probe supported by an elastic body. SOLUTION: The three-dimensional shape measuring apparatus, having the contact-type probe supported by a plurality of elastic bodies, is constituted in such a way that coefficients of elasticity of the plurality of elastic bodies are different. The measuring apparatus is constituted in such a way that, from among the plurality of elastic bodies, the coefficients of elasticity of the elastic bodies installed on the side closer to the work of the probe coming into contact with the work becomes larger than those of the elastic bodies installed on a side more distant from the work.
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