发明名称 |
SEMICONDUCTOR-DEVICE INSPECTING APPARATUS AND A METHOD FOR MANUFACTURING THE SAME |
摘要 |
A semiconductor inspecting apparatus having a plurality of electrical connection boards arranged in the inspecting apparatus and a plurality of probes respectively provided on a plurality of beams formed on a first board of said plurality of electrical connection boards, the probes being adapted to be individually brought into contact with a plurality of electrode pads of a semiconductor device for inspection, so as to inspect the semiconductor device while establishing electrical connection therebetween. A one-end supported beam is used as each of the beams, and each of the probes is formed at a portion shifted in a rectangular direction to a center line of a longitudinal direction of the one-end supported beam.
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申请公布号 |
US2003102880(A1) |
申请公布日期 |
2003.06.05 |
申请号 |
US20020316828 |
申请日期 |
2002.12.12 |
申请人 |
KANAMARU MASATOSHI;ENDO YOSHISHIGE;AONO TAKANORR;KOHNO RYUJI;MIYATAKE TOSHIO;AOKI HIDEYUKI;BAN NAOTO |
发明人 |
KANAMARU MASATOSHI;ENDO YOSHISHIGE;AONO TAKANORR;KOHNO RYUJI;MIYATAKE TOSHIO;AOKI HIDEYUKI;BAN NAOTO |
分类号 |
G01R31/26;G01R1/073;H01L21/66;(IPC1-7):G01R31/02 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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