METHOD FOR ASCERTAINING THE REFRACTIVE INDEX AND LAYER THICKNESS OF A TRANSPARENT LAYER BY MEANS OF ELLIPSOMETRY

摘要

The invention relates to an ellipsometric method for ascertaining characteristic variables of transparent layers. A pair of ellipsometric variables of a layer (2) to be examined is ascertained on said layer at a first layer thickness and then at a second layer thickness. One of the two layer thicknesses can also have a value of 0, in which case the pair of ellipsometric variables are being measured on an uncoated substrate (1). The refractive index of the layer to be examined is ascertained from the total of four measured ellipsometric variables using a given formula, and the layer thickness can be ascertained from the refractive index using known ellipsometric methods.