| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection system and an inspection method, where an inspection result and an inspection frequency are well balanced with each other by automatically changing the inspection frequency, corresponding to the state of the inspection result. SOLUTION: A decision unit 50 receives data RA to RC, which are outputted as inspection results from inspection devices 1A to 1C and has a function to determine the inspection rate of lots (inspection lot) to be inspected hereafter and the inspection rate of semiconductor wafers (inspection semiconductor wafer) contained in each lot and to be inspected hereafter by data processing carried out on the basis of the data RA to RC. That is, the decision unit 50 has a function to automatically change the inspection frequency of the lots and the wafers on the basis of the past inspection results. COPYRIGHT: (C)2003,JPO
|
