发明名称 Device packaging facility and method, and device processing apparatus utilizing phthalate
摘要 Provided are a device packing facility and method using phthalate and a device processing apparatus utilizing the phthalate. The device packaging facility includes a mounting unit providing phthalate between first and second devices to attach the first and second devices to each other, a processing unit thermally processing the first and second devices that are attached to each other to remove the phthalate and fix the first and second devices to each other, and a transfer unit transferring the first and second devices that are attached to each other from the mounting unit to the processing unit.
申请公布号 US9472531(B2) 申请公布日期 2016.10.18
申请号 US201514616029 申请日期 2015.02.06
申请人 Semigear, Inc. 发明人 Zhang Jian;Pinnolis Joshua;Luo Shijian
分类号 G01R31/26;H01L23/00;H01L21/66 主分类号 G01R31/26
代理机构 Harness, Dickey & Pierce, P.L.C. 代理人 Harness, Dickey & Pierce, P.L.C.
主权项 1. A device packaging method comprising: providing phthalate between first and second devices to attach the first and second devices to each other; thermally processing the first and second devices that are attached to each other to remove the phthalate; and thermally processing the first and second devices to fix the first and second devices to each other.
地址 Wakefield MA US