发明名称 |
Device packaging facility and method, and device processing apparatus utilizing phthalate |
摘要 |
Provided are a device packing facility and method using phthalate and a device processing apparatus utilizing the phthalate. The device packaging facility includes a mounting unit providing phthalate between first and second devices to attach the first and second devices to each other, a processing unit thermally processing the first and second devices that are attached to each other to remove the phthalate and fix the first and second devices to each other, and a transfer unit transferring the first and second devices that are attached to each other from the mounting unit to the processing unit. |
申请公布号 |
US9472531(B2) |
申请公布日期 |
2016.10.18 |
申请号 |
US201514616029 |
申请日期 |
2015.02.06 |
申请人 |
Semigear, Inc. |
发明人 |
Zhang Jian;Pinnolis Joshua;Luo Shijian |
分类号 |
G01R31/26;H01L23/00;H01L21/66 |
主分类号 |
G01R31/26 |
代理机构 |
Harness, Dickey & Pierce, P.L.C. |
代理人 |
Harness, Dickey & Pierce, P.L.C. |
主权项 |
1. A device packaging method comprising:
providing phthalate between first and second devices to attach the first and second devices to each other; thermally processing the first and second devices that are attached to each other to remove the phthalate; and thermally processing the first and second devices to fix the first and second devices to each other. |
地址 |
Wakefield MA US |