| 摘要 |
PROBLEM TO BE SOLVED: To overcome the problem wherein, when a strain gauge or piezoelectric film is used, measurement is restricted to severalμm order and two-dimensional distributions are not able to be measured by means of one element and, in addition, when a Michelson interferometer utilizing the interference of light is used, measurement can be performed to nm order, but objects to be measured are restricted due to the large size of the interferometer itself. SOLUTION: A displacement sensor is constituted to form a grating 4 which changes in pitch (p) as a substrate 2 expands or contracts on the surface of the substrate 2. The substrate 2 expands or contracts in accordance with the form variation of an object 1 to be measured. Consequently, the sensor can observe displacement of several tens nm to mm order and, at the same time, can two-dimensionally observe the form variation of the object 1. COPYRIGHT: (C)2003,JPO
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