APPARATUS FOR MEASURING HORIZONTAL STATE OF CONVEYING DEVICE

摘要

PURPOSE: A horizontal state measuring apparatus is provided to adjust a horizontal state of a plate supporting a semiconductor substrate by using a pair of bubble tube levels and first and second notch marks. CONSTITUTION: A horizontal state measuring apparatus(100) includes a body(102) having a rectangular plate shape. First and second bubble tube levels(104,106) are accommodated in the body(102) in perpendicular to each other. A first notch mark(108) is formed at an upper surface of the body(102) in order to measure a bubble position of the first bubble tube level(104). A second notch mark(110) is formed at one side of the body in order to measure a horizontal state and height of a handler used for resting a semiconductor substrate on a plate provided in a semiconductor processing device. First and second windows are formed on the upper surface of the body(102).