| 摘要 |
PURPOSE: Provided are a device and a method for continuously treating a surface of steric polymer, which improve an antistatic property and conductivity of surface of polymer having a steric conformation, by using plasma ion implantation with pulse. CONSTITUTION: The device comprises a high frequency supply part consisting of a high frequency power supply unit(27), a matching box(26) and an antenna(25); a gas inlet unit(71); a gas source(72); and a processing chamber(21) having vacuum pump(12); an inlet chamber(11) and an outlet chamber(33) which can be air-stripped; a transfer unit(51) which is positioned so as to sequentially pass the inlet chamber(71), the processing chamber(21), and the outlet chamber(33); and a transfer system for driving the transfer unit. Further, the device is characterized by further comprising automatic opening/shutting doors which enables the transfer unit to pass the inlet chamber(71), the outlet chamber(33), septa between the inlet chamber(71) and the processing chamber(21), and septa between the processing chamber(21) and the outlet chamber(33).
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