Oxide thin films and composites and related methods of deposition

摘要

Thin oxide films are deposited on substrates by metal-organic molecular beam epitaxy (MOMBE) and can be incorporated into a variety of composite materials. The composites/films are characterized by a combination of transmission electron microscopy, Auger spectrometry and atomic force microscopy. Analyzes indicate that the films directly deposited on substrates are stoichiometric and phase-pure. Carbon contamination of the films resulting from precursor decomposition was not observed.