摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor with increased voltage sensitivity and capable of preventing a polarization fall by pyroelectric voltage. SOLUTION: A layer 2b of a central part of a piezoelectric element 2 is a dummy layer which does not generate an electric charge, when acceleration is applied. Outside piezoelectric layers 2a and 2c are divided into four cells in the lengthwise direction by two boundaries B1 and boundary B2 of the lengthwise direction central part in which stresses are reversed in the lengthwise direction, when acceleration is applied, and polarized in the thickness direction so that polarization of adjacent cells in the lengthwise direction are in the opposite direction and the polarization of the cells corresponding to the thickness direction are in the same direction. The electrodes 3 and 4 between layers and the main side electrodes 5a, 5b, 6a, and 6b are provided in the piezoelectric element 2. Bridging the boundary B2, two cells on one side and two cells on the other side are connected in parallel, respectively, and two sets of cells on both sides are connected in series. Electrodes 5a and 6a, 5b and 6b pulled out at the ends of the piezoelectric element 2 which differ in the lengthwise direction are connected mutually. COPYRIGHT: (C)2003,JPO
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