| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor measuring apparatus that can measure a very narrow observational area with high reproducibility, can make magnification switching at a high speed, and can be used in an ultra-clean environment, such as the environment in a clean room, etc. SOLUTION: This semiconductor measuring apparatus is constituted to fetch the enlarged image of a semiconductor used as a sample 2 into an image processor 30. In this instrument, a plurality of independent optical paths 27a-27c is formed in the poststage of an objective lens 22 provided to face the sample 2 and a plurality of optical paths of a microscope having different expanding magnifications is formed by respectively installing lens groups 28a-28c and detector means 29a-29c to the optical paths 27a-27c. At the same time, a screen switching means 31 which switches and controls the detector means 29a-29c is provided so that the images obtained through the optical paths of the microscope may be fetched to the image processor 30 by appropriately selecting the images by means of the switching means 31. COPYRIGHT: (C)2003,JPO
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