| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal treatment apparatus for a glass substrate of high production efficiency in spite of a low-cost energy-saving type. SOLUTION: In this thermal treatment apparatus A for a glass substrate, the glass substrates 2 which are heated bodies, can be enclosed and disposed in multiple stages in a box-shaped heating furnace body 1, and heaters 3 are disposed almost on the whole inside of the heating furnace body. In this constitution, an air agitation fan 50 is provided at a sidewall on one side of the heating furnace body. COPYRIGHT: (C)2003,JPO
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