发明名称 METHOD AND APPARATUS FOR HERMETIC SEALING
摘要 PROBLEM TO BE SOLVED: To provide a method and an apparatus for hermetically sealing a package by dispensing with a large-sized chamber. SOLUTION: The method for hermetically sealing the package comprises steps of positioning a container 31 for mounting a lid 32 in an opening on a rotary table 18 in the chamber 10 having an upper cover 12, closing the cover 12 to bring roller electrodes 191, 192 of the lower surface of the cover into contact with two opposed sides of the lid 32, and evacuating the inside of the chamber 10. The method further comprises steps of moving a rotary platen 23 on an X-Y linearly driving mechanism 20 in an X-axis direction, and seam- welding the two sides of the lid 32 by energizing the table 18 on a magnetically coupled slider 17 while moving the table 18 in the same direction by in the same direction. The method also comprises steps of further rotating the platen 23, rotating the table 18 at 90°, bringing the other two sides of the lid 32 into contact with the electrodes 191, 192, and seam-welding the other two sides of the lid 32 by energizing the table 18 by reciprocating the table 18. COPYRIGHT: (C)2003,JPO
申请公布号 JP2003273261(A) 申请公布日期 2003.09.26
申请号 JP20020069665 申请日期 2002.03.14
申请人 NIPPON AVIONICS CO LTD 发明人 IWATSUKI TADAHIRO
分类号 H01L23/02;(IPC1-7):H01L23/02 主分类号 H01L23/02
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