| 摘要 |
PROBLEM TO BE SOLVED: To save resources and energy. SOLUTION: A cleaning and liquid supplying head 22 is formed by integrating a cleaning head unit 60 and a liquid supplying head unit 70. The cleaning head unit 60 has an organic substance cleaning unit 62, an inorganic substance cleaning unit 64, a rinsing unit 66, and a drying unit 68. The organic substance cleaning unit 62, the inorganic substance cleaning unit 64, and the rinsing unit 66 selectively supply a first cleaning liquid 74, a second cleaning liquid 80, and purified water 88 respectively to pattern forming regions 108 of a substrate 10 for cleaning them. The drying unit 68 blows hot air 96 onto the rinsed pattern forming regions 108 for drying the pattern forming regions 108. The liquid supplying head unit 70 selectively supplies a liquid pattern material 102 onto the cleaned pattern forming regions 108. COPYRIGHT: (C)2004,JPO
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