METHOD OF SUPPLYING LIQUIFIED GAS

摘要

PROBLEM TO BE SOLVED: To provide a pipeline for supplying gas which stably supplies liquified gas at a constant flow rate. SOLUTION: The gas supplying pipeline (between a process tube and a liquified gas cylinder) is provided with a vacuum pump to forcibly send out and draw in gas from and into the liquified gas cylinder, resulting in supplying liquified gas in the gas-supplying pipeline and in the process tube stably at a constant flow rate. COPYRIGHT: (C)2004,JPO