| 摘要 |
PROBLEM TO BE SOLVED: To prevent the generation of unevenness in heat treatment such as firing by nearly uniformizing the flow velocity of the gas blown into a heating chamber. SOLUTION: A heating chamber 2 accommodating an object w to be treated, a heat source 4, and a fan 3 are disposed in the middle of a gas circulating passage 5 provided in a furnace chamber 1a of a furnace body 1. The fan 3 is provided in the vicinity of the outlet 2b of the heating chamber 2 so that the suction port 3a of the fan 3 faces the outlet 2b of the heating chamber 2. In the circulating passage 5, a temperature compensating heat source 10 or a heat conductor 11 giving and receiving the circulating gas and heat may be provided between the heat source 4 and the inlet 2a of the heating chamber 2. COPYRIGHT: (C)2004,JPO
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