| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure thickness even in a specimen having a curvature such as a lens where reflected waves are attenuated more strongly compared with a plane. SOLUTION: The measuring apparatus due to ultrasonic waves for irradiating a specimen with ultrasonic waves from an ultrasonic vibrator via an ultrasonic propagation substance and for calculating the thickness of the specimen from the time difference between reflection waves on the front and rear of the object to be measured comprises a measurement section 10 for measuring a sample that has nearly the same shape as the specimen and whose thickness is known and for measuring the specimen, a correction section 13 for inputting the known thickness of the sample and the measurement value of the sample by the measurement section 10, and for obtaining a correction value for correcting the measurement value of the measurement section 10, an operation section 11 for correcting the measurement value of the specimen from the correction value out of the correction section 13, and a display section 12 for displaying the thickness of the specimen obtained by correction at the operation section 11. COPYRIGHT: (C)2004,JPO
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