PRESSURE-BASED GAS DELIVERY SYSTEM AND METHOD FOR REDUCING RISKS ASSOCIATED WITH STORAGE AND DELIVERY OF HIGH PRESSURE GASES
摘要
A method of reducing ventilation gas flow rate through a gas cabinet comprising a gas source vessel and a gas delivery system comprising a gas cabinet.
申请公布号
AU2003237350(A1)
申请公布日期
2003.12.22
申请号
AU20030237350
申请日期
2003.05.29
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.
发明人
MATTHEW, B. DONATUCCI;LUPING WANG;MICHAEL, J. WODJENSKI;KARL, W. OLANDER
