发明名称 Wafer-bonding using solder and method of making the same
摘要 A method is provided for forming a wafer stack. This may include providing a first wafer having a first plurality of metalized trenches on a surface of the first wafer. A second wafer may be provided having a second plurality of metalized trenches on a surface of the second wafer facing the first wafer. The first plurality of metalized trenches may be solder bonded to the second plurality of metalized trenches.
申请公布号 US6667225(B2) 申请公布日期 2003.12.23
申请号 US20010015618 申请日期 2001.12.17
申请人 INTEL CORPORATION 发明人 HAU-RIEGE STEFAN;HAU-RIEGE CHRISTINE
分类号 H01L21/301;H01L21/98;(IPC1-7):H01L21/301 主分类号 H01L21/301
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