Capacitively coupled devices and oscillators

摘要

Certain embodiments described herein are directed to devices that can be used to sustain a capacitively coupled plasma. In some examples, a capacitive device can be used to sustain a capacitively coupled plasma in a torch in the absence of any substantial inductive coupling. In certain embodiments, a helium gas flow can be used with the capacitive device to sustain a capacitively coupled plasma.

主权项

1. A device comprising:
a torch; and a capacitive device external to and around at least a portion of the torch and contacting an outer surface of the torch, the capacitive device configured to provide radio frequency energy to the torch to sustain a capacitively coupled plasma in the torch, wherein the capacitive device comprises a wire coil external to and coiled around the torch, in which the wire coil is configured to couple to an oscillator at a first end of the wire coil and configured to contact an outer surface of the torch at a second terminal end of the wire coil to provide capacitive coupling to the torch.