| 摘要 |
PURPOSE: A deposition apparatus of an organic EL(Electro-Luminescence) layer is provided to be capable of uniformly forming the EL layer on the entire surface of a substrate by using a unit deposition source. CONSTITUTION: A deposition apparatus of an organic EL layer, includes a deposition source(11) for heating the deposition material stored at the inner portion by using a supply voltage and a jet part for jetting the deposition material to the surface of a substrate. At this time, the deposition source is formed into a case type structure. Preferably, the deposition source includes an upper part(11A), a lateral part(11B-1), and a bottom part(11B). Preferably, the deposition source is capable of moving up and down. Preferably, the substrate is capable of moving up and down.
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