| 摘要 |
The present invention is generally directed to a fault detection control system using dual bus architecture, and methods of using same. In one illustrative embodiment, the system comprises a plurality of process tools, each of the tools adapted to perform at least one process operation on at least one workpiece, at least one sensor that is operatively coupled to each of the process tools and adapted to sense at least one parameter associated with at least one process operation, an initial fault detection unit coupled to an instrument bus, the initial fault detection unit adapted to receive data from at least one sensor on each of the plurality of process tools via the instrument bus, and a primary fault detection unit operatively coupled to a manufacturing execution system and a system bus, the data from the sensors on each of the plurality of process tools being provided to the primary fault detection unit after the data is processed in the initial fault detection unit. In one illustrative embodiment, one of the methods of identifying faults in a manufacturing system comprises processing a workpiece in a process tool, obtaining data regarding the processing of the workpiece in the process tool via at least one sensor that is operatively coupled to the process tool, providing the data obtained by the at least one sensor to an initial fault detection unit that is adapted to receive the data via an instrument bus, the initial fault detection unit determining if an alarm condition exists, and providing the data to a primary fault detection control unit via a system bus after the data is processed through the initial fault detection unit.
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