Row-based placement scoring and legalization measure for books with phase shift mask dependencies

摘要

A method and structure for checking legality of books in a phase-shift circuit design mask which arranges the books in rows, determines a book polarity of phase shift mask features of each of the books, sums polarities of the books within each of the rows to produce a row polarity of phase shift mask features of the row, checks whether the row polarity complies with legal requirements of the circuit design, and modifies placement of the books until all of the rows comply with the legal requirements.