| 摘要 |
A micromirror (110) includes a frame portion (112), a gimbal portion (114) and a mirror portion (116) formed from a single piece of material. A plurality of truss members (140/142) are disposed beneath the gimbal portion (114) and mirror portion (116), allowing the gimbal and mirror portions (114/116) to be made of a thinner material, reducing the mass and increasing the resonant frequency of the micromirror device (110).
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