| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve accuracy of failure determination. <P>SOLUTION: This failure determination device is equipped with a plurality of sensors 20 for detecting respectively motions of a final output spot and a plurality of moving spots of a mechanical moving device 10 and outputting the result as a sensor signal, a primary determination means 30 and a secondary determination means 40 for determining necessity of motion stop and failure determination of the mechanical moving device 10 based on the sensor signal of the final output spot, and a deteriorated motion pattern database 51 acquired by inputting the result of a moving mechanism simulation of a deterioration characteristic of the moving spots into the sensor 20. When the failure determination is determined to be necessary by the primary determination means 30 and the secondary determination means 40, the sensor signal of motion of the moving spot is compared contrastedly with a deteriorated motion pattern of the deteriorated motion pattern database 51, and the present deteriorated motion pattern of the mechanical moving device 10 is selected by a deteriorated motion pattern selection means 50. <P>COPYRIGHT: (C)2004,JPO</p> |
