ORGANIC OPTICAL WAVEGUIDE, OPTICAL COMPONENT, AND METHOD FOR MANUFACTURING OPTICAL COMPONENT

摘要

PROBLEM TO BE SOLVED: To easily integrate an organic optical waveguide and other elements on the same substrate, to reduce production of residues after dry etching such as RIE, and to provide an organic optical waveguide and an optical component which are inexpensive and has excellent processability and small propagation loss. SOLUTION: A core part 3 is formed of an organic polymer on the substrate 1 across a buffer layer 2 and a laminar overclad 5 is formed of an inorganic dielectric such as silicon oxide so that the core part 3 is covered including the substrate surface on the side where the core part 3 is formed. The overclad layer 5 is thinner than the core part 3 and a semiconductor laser 12 as an optical element is mounted on the overclad part 5 covering the substrate 1 on the side of the core part 3. COPYRIGHT: (C)2004,JPO